4. Geometrical instruments
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Optical calibration plate and the assembling method for the...

Geometrical instruments – Gauge – Collocating
Reexamination Certificate

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Overlay mark for concurrently monitoring alignment accuracy,...

Geometrical instruments – Gauge – Collocating
Reexamination Certificate

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Overlay reliability monitor

Geometrical instruments – Gauge – Collocating
Reexamination Certificate

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Overlay vernier

Geometrical instruments – Gauge – Collocating
Reexamination Certificate

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