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Precise, in-situ endpoint detection for charged particle...

Etching a substrate: processes – Pattern or design applied by transfer
Reexamination Certificate

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Processes and materials for step and flash imprint lithography

Etching a substrate: processes – Pattern or design applied by transfer
Reexamination Certificate

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Processes and materials for step and flash imprint lithography

Etching a substrate: processes – Pattern or design applied by transfer
Reexamination Certificate

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