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Method to make gas permeable shell for MEMS devices with...

Etching a substrate: processes – Etching to produce porous or perforated article
Reexamination Certificate

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Methods for making internal die filters with multiple...

Etching a substrate: processes – Etching to produce porous or perforated article
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Microfabricated particle filter

Etching a substrate: processes – Etching to produce porous or perforated article
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Molecular imprinting of small particles, and production of...

Etching a substrate: processes – Etching to produce porous or perforated article
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Multiple optical channels for chemical analysis

Etching a substrate: processes – Etching to produce porous or perforated article
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