Microfabricated particle filter

Details Microfabricated particle filter Microfabricated particle filter

1994-03-07

1997-07-29

Drodge, Joseph W.

Etching a substrate: processes

Etching to produce porous or perforated article

210490, 21050026, 427244, 427585, C03C 1500, B01D 6700

Patent

active

056519001

ABSTRACT:
A thin film filter fabricated using surface micromachining. The width of the filter pores is determined by the thickness of a sacrificial thin-film layer. This dimension can be precisely controlled, and may be as small as about 50 angstroms. The pore length may also be determined by the thickness of thin film layers and can therefore be smaller than the limit of resolution obtainable with photolithography. The filters are suitable for use at high temperatures and with many harsh solvents.

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