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X- And y-axis driver for rotating microspheres

Electricity: motive power systems – Positional servo systems – With particular motor control system responsive to the...
Patent

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X-Ray tube control system

Electricity: motive power systems – Braking – Automatic and/or with time-delay means
Patent

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X-Y Addressable workpiece positioner and mask aligner using same

Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Patent

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X-Y addressable workpiece positioner and mask aligner using same

Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Patent

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X-Y addressable workpiece positioner and mask aligner using same

Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Patent

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X-Y Addressable workpiece positioner having an improved X-Y addr

Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Patent

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X-Y positioner based on X axis motions

Electricity: motive power systems – Positional servo systems – Program- or pattern-controlled systems
Reexamination Certificate

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X-Y Positioning subsystem electronics

Electricity: motive power systems – Positional servo systems – Adaptive or optimizing systems including 'bang-bang' servos
Patent

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XY drive apparatus equipped with a linear electromagnetic actuat

Electricity: motive power systems – Positional servo systems – With particular motor control system responsive to the...
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XY table for a semiconductor manufacturing apparatus

Electricity: motive power systems – Plural – diverse or diversely controlled electric motors
Reexamination Certificate

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Xy-surface drive having limited .phi.-rotation and z-movement

Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Patent

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XYZ-axes table

Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Reexamination Certificate

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XYZ-axes table

Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Reexamination Certificate

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