Xy-surface drive having limited .phi.-rotation and z-movement

Details Xy-surface drive having limited .phi.-rotation and z-movement Xy-surface drive having limited .phi.-rotation and z-movement

1984-11-21

1987-04-07

Dobeck, Benjamin

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

318640, 318687, G05B 106

Patent

active

046564080

ABSTRACT:
An xy-surface drive of limited .phi.-rotation and z-movement, has three box coils, positioned at mutual angles of 120.degree., the coils being mechanically connected to each other, and guided in the working air-gap of the magnet ring segment system such that when current flows through the coils, there a power or momentum results, which moves and/or rotates the coil arrangement which, by means of an electrodynamic system, is deflectably connected in z-direction to the object support only via a plate spring. The coil arrangement is connected to an incremental x-y-.phi.-measured value indicator, so that a position control connects the coils according to the deviation to the voltage sources of various polarity, so that the ideal position is attained. The z-position is optimized via an analyzer of object sharpness and a position control.

REFERENCES:
patent: 3745433 (1973-07-01), Kelby et al.
patent: 4485339 (1984-11-01), Trost
patent: 4506204 (1985-03-01), Galburt
patent: 4506205 (1985-03-01), Trost et al.
patent: 4507597 (1985-03-01), Trost

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