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Stage-drive control apparatus and method, and scan-projection ty

Electricity: motive power systems – Positional servo systems – Plural servomotors
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Synchronization control device for servo motors

Electricity: motive power systems – Positional servo systems – Plural servomotors
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Synchronization control method and synchronization control...

Electricity: motive power systems – Positional servo systems – Plural servomotors
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Synchronization restoring system

Electricity: motive power systems – Positional servo systems – Plural servomotors
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Synchronous control device

Electricity: motive power systems – Positional servo systems – Plural servomotors
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Synchronous control method and apparatus therefor

Electricity: motive power systems – Positional servo systems – Plural servomotors
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System and method for a scalable motion controller for...

Electricity: motive power systems – Positional servo systems – Plural servomotors
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System for controlling motors for synchronous operation

Electricity: motive power systems – Positional servo systems – Plural servomotors
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Tandem control method based on a digital servomechanism

Electricity: motive power systems – Positional servo systems – Plural servomotors
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Tracking control method between two servo systems

Electricity: motive power systems – Positional servo systems – Plural servomotors
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Wafer prober having sub-micron alignment accuracy

Electricity: motive power systems – Positional servo systems – Plural servomotors
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