Stage-drive control apparatus and method, and scan-projection ty
Synchronization control device for servo motors
Synchronization control method and synchronization control...
Synchronization restoring system
Synchronous control device
Synchronous control method and apparatus therefor
System and method for a scalable motion controller for...
System for controlling motors for synchronous operation
Tandem control method based on a digital servomechanism
Tracking control method between two servo systems
Wafer prober having sub-micron alignment accuracy