Linear motor

Linear motor

Linear motor

Linear motor

Linear motor and control method thereof

Linear motor and transducer arrangement therefor

Linear motor apparatus

Linear motor apparatus

Linear motor apparatus, and stage apparatus, exposure system and

Linear motor control system and method

Linear motor device, stage device, and exposure apparatus

Linear motor door actuator

Linear motor drive system

Linear motor driven transfer switch assembly

Linear motor system

Linear motor velocity sensor

Linear motor with improved coil design and heat removal

Linear motor with non-magnetic armature

Linear motor, apparatus, armature coil current supply circuit fo

Linear motor-driven table apparatus capable of operating both in