Linear motor apparatus, and stage apparatus, exposure system and

Details Linear motor apparatus, and stage apparatus, exposure system and Linear motor apparatus, and stage apparatus, exposure system and

1996-06-18

1999-10-26

Ramirez, Nestor

Electricity: motive power systems

Linear-movement motors

310 12, H02K 4100, H01L 2168

Patent

active

059734590

ABSTRACT:
A linear motor apparatus includes a mover, a stator, a detector, and a driver. The mover is adapted to be shifted along a shifting direction, and has a predetermined magnetic flux distribution. The stator has a plurality of coils aligned along the shifting direction of the mover. The detector detects the relative position of the mover with respect to the stator. The driver excites two or more coils simultaneously based on a predetermined target value and the output of the detector.

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