Magnetically shielded linear motors, and stage apparatus...

Magnetically-positioned X-Y stage having six-degrees of freedom

Marking device

Measure system for linear planar stepping motor

Mechanism for compensating the gravitational force acting on...

Method and apparatus for accelerating flying bodies

Method and apparatus for controlling the carriage of a linear mo

Method and apparatus for cooling hot spots in platen of linear m

Method and apparatus for cooling power supply wires used to...

Method and apparatus for elimination of the exit-edge effect in

Method and apparatus for generating electrical energy

Method and apparatus for precisely moving a motor armature

Method and apparatus for vibration reduction/control in a variab

Method and arrangement for operating a magnetically...

Method and arrangement for operating a magnetically...

Method of manufacturing linear motor, linear motor, stage...

Methods and apparatus involving selectively tailored...

Micro stage with 6 degrees of freedom

Micro-mover with balanced dynamics

Modular conveyor system having multiple moving elements...