Electrical generator or motor structure – Dynamoelectric – Linear
Patent
1997-04-28
1999-03-23
Ramirez, Nestor
Electrical generator or motor structure
Dynamoelectric
Linear
310 17, 310 15, 414935, H02K 4102
Patent
active
058864326
ABSTRACT:
The respective square cross-section permanent magnets of each of a plurality of spaced Halbach magnet arrays, attached to the bottom of movable X-Y stage and aligned with a given one of the X and Y axes, are spaced from one another parallel to the other one of the X and Y axes of by the width of the square cross-section cooperates with both a first set of a plurality of flat stationary electromagnet coils of wire and a second set of a plurality of flat stationary electromagnet coils of wire that substantially lie in proximate horizontal X, Y planes and, respectively, are angularly offset by +45.degree. and -45.degree. with respect to the given one of the X and Y horizontal axes to provide a lateral translational force on the stage with respect to the horizontal X and/or Y axes and/or a levitating translational force on the stage with respect to the vertical Z axis. First, second and third pairs of spaced electromagnets attached to the bottom of movable X-Y stage and situated in spaces between adjacent Halbach magnet arrays cooperate with both the first and second sets electromagnet coils of wire to create couples that can tilt the stage about the X and/or Y axes and/or yaw the stage about the Z axis. This configuration of Halbach magnet arrays and electromagnetic coils provides a compact and energy efficient X-Y stage suitable for use in a wafer-stepper for positioning a large (e.g., 200-300 mm.) silicon wafer employed in the photolithographic manufacture of monolithic integrated circuits.
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Jones Allston L.
Mullins Burton
Ramirez Nestor
Ultratech Stepper, Inc.
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