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Excitation arrangement for a long stator drive

Electrical generator or motor structure – Dynamoelectric – Linear
Patent

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Exposure apparatus and method

Electrical generator or motor structure – Dynamoelectric – Linear
Patent

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Exposure apparatus with a stage, driving unit,and force...

Electrical generator or motor structure – Dynamoelectric – Linear
Reexamination Certificate

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Exposure control system

Electrical generator or motor structure – Dynamoelectric – Linear
Patent

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Extreme-UV scanning wafer and reticle stages

Electrical generator or motor structure – Dynamoelectric – Linear
Reexamination Certificate

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