Exposure apparatus and method

Details Exposure apparatus and method Exposure apparatus and method

1997-04-02

1998-07-14

Stephan, Steven L.

Electrical generator or motor structure

Dynamoelectric

Linear

248638, 310 905, H02K 4100, F16F 1503

Patent

active

057809437

ABSTRACT:
A stage apparatus has a pair of permanent-magnets fixed to a magnet holder and a coil fixed to a coil holder and positioned between the permanent-magnets. When electric current is supplied to the coil, an attractive force is generated between the coil and the upper permanent-magnet, while a repulsive force is generated between the coil and the lower permanent-magnet, thereby moving the coil holder in the vertical direction relative to the magnet holder. When the attractive force and repulsive force act on the coil simultaneously, the resultant force has high linearity with respect to the electric current because the attractive force and the repulsive force cancel the nonlinear characteristics of each other.

REFERENCES:
patent: 3493275 (1970-02-01), Stone et al.
patent: 4952858 (1990-08-01), Galburt
patent: 5294854 (1994-03-01), Trumper

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