Seal for micro-electro-mechanical devices

Sensor with semi-permanently deformable element for active...

Side-arm microactuator with piezoelectric adjuster

Silicon structural support of linear microactuator

Slide microactuator using C-shaped piezoelectric element

Slide microactuator using S-shaped piezoelectric element

Slider and micro-actuator assembly, head gimbal assembly,...

Slider having adjusted transducer recession and method of...

Slider with independent fly-height adjustment of reader and...

Slider with independent fly-height adjustment of reader and...

Slider with transducing and heating elements formed on...

Slider-level microactuator for precise head positioning

Structure and fabrication process for integrated moving-coil...

Structure for electrically connecting microelectromechanical...

Structures for pole-tip actuation

Suspension assembly including a shape memory flexure element...

Suspension assembly with a shape memory actuator coupled to...

Suspension assembly with a shape memory actuator coupled to...

Suspension assembly with adjustable gramload

Suspension assembly with piezoelectric microactuators...