4. Drying and gas or vapor contact with solids
  5. Material treated by electromagnetic energy
  6. Ultraviolet energy
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Method and apparatus for hardening a layer on a substrate

Drying and gas or vapor contact with solids – Material treated by electromagnetic energy – Ultraviolet energy
Reexamination Certificate

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Method for treating surfaces of substrates and apparatus

Drying and gas or vapor contact with solids – Material treated by electromagnetic energy – Ultraviolet energy
Reexamination Certificate

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Method of ozone conversion in semiconductor manufacturing

Drying and gas or vapor contact with solids – Material treated by electromagnetic energy – Ultraviolet energy
Reexamination Certificate

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