4. Drying and gas or vapor contact with solids
  5. Material treated by electromagnetic energy
  6. Ultraviolet energy
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Clothes dryer with ultraviolet light

Drying and gas or vapor contact with solids – Material treated by electromagnetic energy – Ultraviolet energy
Reexamination Certificate

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Contamination control in substrate processing system

Drying and gas or vapor contact with solids – Material treated by electromagnetic energy – Ultraviolet energy
Patent

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Continuous path variable width light attenuation device for...

Drying and gas or vapor contact with solids – Material treated by electromagnetic energy – Ultraviolet energy
Reexamination Certificate

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