4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
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Fabrication of silicon microclusters and microfilaments

Coating processes – Direct application of electrical – magnetic – wave – or... – Chemical vapor deposition
Patent

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Film deposition apparatus and film deposition method

Coating processes – Direct application of electrical – magnetic – wave – or... – Chemical vapor deposition
Reexamination Certificate

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