4. Coating apparatus
  5. With heat exchange, drying, or non-coating gas or vapor...
  6. With solid heat exchange means contacting work
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Low compliance seal for gas-enhanced wafer cooling in vacuum

Coating apparatus – With heat exchange – drying – or non-coating gas or vapor... – With solid heat exchange means contacting work
Patent

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Lubricator roll

Coating apparatus – With heat exchange – drying – or non-coating gas or vapor... – With solid heat exchange means contacting work
Patent

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