4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Thin active physical layer which is
  6. Low workfunction layer for electron emission
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Emitter for electron-beam projection lithography system and...

Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is – Low workfunction layer for electron emission
Reexamination Certificate

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Emitter with filled zeolite emission layer

Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is – Low workfunction layer for electron emission
Reexamination Certificate

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