4. Active solid-state devices (e.g., transistors, solid-state diode
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Fabrication of MEMS devices with spin-on glass

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Non-single crystal – or recrystallized – material containing...
Reexamination Certificate

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Forming silicides with reduced tailing on silicon germanium...

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Non-single crystal – or recrystallized – material containing...
Reexamination Certificate

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