4. Photocopying
  5. Projection printing and copying cameras
  6. Step and repeat

Edwin Teunis Van Donkelaar

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Lithographic apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – Step and repeat
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Lithographic apparatus, position quantity detection system...

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Lithographic motion control system and method

Data processing: generic control systems or specific application – Generic control system – apparatus or process – Optimization or adaptive control
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3015327

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