4. Semiconductor device manufacturing: process
  5. Controlling charging state at semiconductor-insulator interface

Kiyohiro Matsushita

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Method for forming dielectric SiOCH film having chemical...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method of forming silicon-containing insulation film having...

Semiconductor device manufacturing: process – Controlling charging state at semiconductor-insulator interface
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2760373

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