4. Cleaning and liquid contact with solids
  5. Processes
  6. Including use of vacuum, suction, or inert atmosphere

Sharone Gindel

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Vacuum debris removal system for an integrated circuit...

Cleaning and liquid contact with solids – Processes – Including use of vacuum – suction – or inert atmosphere
Reexamination Certificate

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Vacuum debris removal system for an integrated circuit...

Brushing – scrubbing – and general cleaning – Machines – With air blast or suction
Reexamination Certificate

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