Vacuum debris removal system for an integrated circuit...

Details Vacuum debris removal system for an integrated circuit... Vacuum debris removal system for an integrated circuit...

2005-12-06

2005-12-06

Snider, Theresa T. (Department: 1744)

Brushing, scrubbing, and general cleaning

Machines

With air blast or suction

C015S301000

Reexamination Certificate

active

06971139

ABSTRACT:
A vacuum debris removal system for an integrated circuit manufacturing device is disclosed. The vacuum debris removal system comprises at least one vacuum tube. An opening is formed in the at least one vacuum tube at a selected location to cause air flow away from an element of the integrated circuit manufacturing device.

REFERENCES:
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patent: 5504301 (1996-04-01), Eveland
patent: 5603775 (1997-02-01), Sjoberg
patent: 5932013 (1999-08-01), Salli et al.
patent: 6059893 (2000-05-01), Kawasaki
patent: 6494965 (2002-12-01), Walker et al.
patent: 2002/1301115 (2002-09-01), Lawson

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