Pattern inspecting apparatus

Details Pattern inspecting apparatus Pattern inspecting apparatus

1988-12-23

1990-07-17

Boudreau, Leo H.

Image analysis

Histogram processing

For setting a threshold

382 8, 382 30, G06K 942

Patent

active

049426192

ABSTRACT:
A pattern inspection apparatus for accurately inspecting a pattern such that design image data is processed in correspondence to resizing of a pattern to be inspected. Image data corresponding to an image area of a predetermined size is extracted from input information represented by binary logic levels and representing a pattern to be resized. Template circuits add additional data of a predetermined logic level to a predetermined pixel position when a distribution of the image logic levels included in the extracted image data is a predetermined distribution. Thus, the additional data is added to the pattern image data to resize the pattern.

REFERENCES:
patent: 4414685 (1983-11-01), Sternberg
patent: 4481664 (1984-11-01), Linger
patent: 4641350 (1987-02-01), Bunn
patent: 4725892 (1988-02-01), Suzuki
"Special Purpose Hardware for Design Rule Checking," Larry Seiler, Feb. 1981.

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