X-ray mask structure and manufacturing methods including forming

Details X-ray mask structure and manufacturing methods including forming X-ray mask structure and manufacturing methods including forming

1992-11-12

1995-06-06

Epps, Georgia Y.

X-ray or gamma ray systems or devices

Specific application

Lithography

378 35, 430 5, G21K 500, G11B 1100, H01L 3900

Patent

active

054229219

ABSTRACT:
An X-ray mask structure includes an X-ray absorber having a masking pattern, an X-ray permeable film for supporting the X-ray absorber on a surface of the X-ray permeable film, and a supporting frame for supporting the X-ray permeable film. The X-ray mask structure has a metal oxide film formed on a portion of the surface of the X-ray permeable film having no X-ray absorber thereon. Also disclosed is a method for manufacturing such an X-ray mask structure.

REFERENCES:
patent: 3742230 (1973-06-01), Spears et al.
patent: 4152601 (1979-05-01), Kadota et al.
patent: 4178403 (1979-12-01), Sakurai et al.
patent: 4468799 (1984-08-01), Harms et al.
patent: 4647517 (1987-03-01), Hersener et al.
patent: 4735877 (1988-04-01), Kato et al.
patent: 5057388 (1991-10-01), Yahalom
patent: 5115456 (1992-05-01), Kimura et al.
patent: 5132186 (1992-07-01), Takeuchi et al.
patent: 5178977 (1993-01-01), Yamada et al.
patent: 5196283 (1993-03-01), Ikeda et al.
patent: 5224139 (1993-06-01), Korenaga et al.
patent: 5247557 (1993-09-01), Ikeda
patent: 5291536 (1994-03-01), Itoh et al.
patent: 5334466 (1994-08-01), Yasui et al.
patent: 5335256 (1994-08-01), Maruyama et al.
Patent Abstracts of Japan, Kokai No. 62-020310, vol. 11, No. 190, Jun. 1987.
Behringer, et al., "Mask For X-Ray Lithography With Optically Transparent Registration Window," IBM Technical Disclosure Bulletin, vol. 25, No. 6, Nov. 1982, p. 2733.

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