Triode plasma reactor with phase modulated plasma control

Details Triode plasma reactor with phase modulated plasma control Triode plasma reactor with phase modulated plasma control

1990-09-27

1991-10-15

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

1180501, 118620, 118728, 156646, 156345, 20429806, 20429834, H01L 21306, B44C 122, B05D 306, C23C 1400

Patent

active

050571850

ABSTRACT:
A triode plasma reactor having first, second and third electrodes for forming a plasma in a reaction chamber from a reactant gas includes a phase modulated potential generator for generating time varying potentials on the second and third electrodes which are phase modulated versions of one another. The phase modulated versions may also include a fixed phase shift between them. By time varying the phase angle relative to a set phase shift, a new dimension of time varying control for the reactor may be obtained. Phase modulation at frequencies from audio frequencies to radio frequencies may be provided. Phase modulation may be accomplished digitally or in the analogue domain.

REFERENCES:
patent: 4464223 (1984-08-01), Gorin
patent: 4572759 (1986-02-01), Benzing
patent: 4585516 (1986-04-01), Corn et al.
patent: 4786359 (1988-11-01), Stark et al.
patent: 4863549 (1989-09-01), Grunwald
patent: 4963242 (1990-10-01), Sato et al.

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