Method of fabricating a silicon lens array

Details Method of fabricating a silicon lens array Method of fabricating a silicon lens array

1983-04-27

1985-06-18

Kittle, John E.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

430320, 430323, 430946, 350128, 350167, 354101, 156647, 156662, G03C 500, G03B 2160

Patent

active

045241279

ABSTRACT:
A lenticular array in silicon is made by anisotropically etching a V-shaped groove in a 100 silicon wafer wherein the walls of the V are made by intersecting 111 planes and exposing the surface having the V-grooves therein to a polishing etch whereby a series of lenses is formed between the V-grooves.

REFERENCES:
Burdick et al., IBM Technical Disclosure Bulletin, vol. 23, No. 9, Feb. 1981, p. 4144.
Tsang et al., J. of Applied Physics, vol. 46, No. 5, May 1975, pp. 2163-2166.
Bassous et al., J. Electrochem. Soc.: Solid-State Science and Technology, vol. 125, No. 8, Aug. 1978, pp. 1321-1327.

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