Micro mechanical component and production process thereof

Details Micro mechanical component and production process thereof Micro mechanical component and production process thereof

1995-03-20

1998-03-17

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

324686, G01C 1956

Patent

active

057290741

ABSTRACT:
A micro mechanical component of the present invention comprises a base, and at least one drive portion supported on the base and relatively driving to the base, in which the drive portion is formed from a diamond layer. Thus, because the drive portion has excellent mechanical strength and modulus of elasticity, the operational performance can be greatly improved as a micro mechanical component processed in a fine shape, from the conventional level. Further, because the drive portion exhibits excellent device characteristics under severe circumstances, the range of applications as a micro mechanical component can be widely expanded from the conventional range.

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"Materials for micro machines and examples of making applied device experimentally"; Institute of Electronics and Communication Engineers of Japan (IECE); Nov. 1994.

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