Trap apparatus

Details Trap apparatus Trap apparatus

1999-03-26

2000-12-05

Smith, Duane S.

Gas separation: apparatus

With inspection means

Transparent

553851, 55423, 554344, 55444, 55445, 55446, 55481, 96420, 438905, 438909, B01D 4508

Patent

active

06156107&

ABSTRACT:
The trap apparatus of the present invention includes a case provided for a gas exhaust system used for a film forming equipment which carries out a film forming process on an object, a gas supply port, made in the case and connected to an exhaust pipe of the gas exhaust system, for introducing an exhaust gas flowing through the exhaust pipe, into the case, a gas exhaust port, made in the case and connected to an exhaust pipe of the gas exhaust system, for exhausting the exhaust gas flowing through an inner space of the case, to the exhaust pipe, a plurality of partition plates arranged in the case so as to partition the inner space of the case into a plurality of rooms between the gas supply port and the gas exhaust port, a gas distribution port provided in some of the partition plates such that the exhaust gas introduced into the case through the gas supply port, is allowed to flow through the rooms partitioned by the partition plates, in the order, and then exhausted from the gas exhaust port, a trap mechanism housed in each of the rooms, for trapping reaction byproducts contained in the exhaust gas introduced into the case through the gas supply port, and a temperature control mechanism for individually controlling the temperatures in the rooms partitioned by the partition plates.

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