Semiconductor integrated circuit device having dummy pattern eff

Details Semiconductor integrated circuit device having dummy pattern eff Semiconductor integrated circuit device having dummy pattern eff

1996-05-16

1997-01-28

Crane, Sara W.

Active solid-state devices (e.g., transistors, solid-state diode

Test or calibration structure

257170, 257354, 257401, 257409, 257773, H01L 2156, H01L 2978, H05K 312

Patent

active

055980104

ABSTRACT:
A semiconductor integrated circuit device has a test component associated with a dummy test pattern for evaluating corresponding circuit components of the integrated circuit, and the test component and the dummy test pattern is surrounded by a peripheral dummy pattern so that a micro loading effect on the test component is equivalent to the corresponding circuit components.

REFERENCES:
patent: 3586930 (1971-06-01), Heath et al.
patent: 5410161 (1995-04-01), Narita

Affiliated with

Also associated with

Rating

Semiconductor integrated circuit device having dummy pattern eff does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor integrated circuit device having dummy pattern eff, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor integrated circuit device having dummy pattern eff will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-942862