Interferometric optical phase discrimination apparatus

Details Interferometric optical phase discrimination apparatus Interferometric optical phase discrimination apparatus

1977-07-06

1978-08-08

Clark, Conrad J.

Optics: measuring and testing

Refraction testing

Prism engaging specimen

356110, 356113, 350 14, G01B 902, G02B 2106

Patent

active

041053354

ABSTRACT:
Film of a known refractive index whose thickness is to be measured is illuminated by a white light beam. Two wave fronts from both sides of the film are directed to an interferometer. The wave fronts are out of phase in accordance with the thickness of the film. The two wave fronts are amplitude-split, respectively, by the beam splitter of the interferometer. Two of the split wave fronts are tilted by tilting means in the interferometer. The other two split wave fronts, as well as the two tilted wave fronts, are directed to an interference surface. Thus, there is formed a white interference pattern on the interference surface. The white interference pattern has a middle peak and two side peaks. The space interval between these peaks is measured by a scanner. By knowing the peak-to-peak interval, it is possible to discriminate the space interval between both sides of the film.

REFERENCES:
patent: 2518647 (1950-08-01), Teeple et al.
patent: 2578859 (1951-12-01), Teeple et al.
patent: 2655073 (1953-10-01), Strickler et al.
patent: 3319515 (1967-05-01), Flournoy

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