Laser scribing method

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

Patent

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Details

156656, 156667, 156901, 21912169, 21912185, B44C 122, C03C 1500, C03C 2506

Patent

active

048656860

ABSTRACT:
A laser scribing system and method is described. In the system, a film formed on a substrate is irradiated with laser beam which is focused on a limited portion of the film in order to remove the portion and produce a groove. Laser beam used for eliminating the portion of film formed on a substrate is deprived of its border portion in advance of the focusing. Sperical aberration is suppressed due to this elimination.

REFERENCES:
patent: 4786358 (1988-11-01), Yamazaki et al.

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