Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Patent
1996-04-24
1999-07-06
Epps, Georgia
Optical: systems and elements
Deflection using a moving element
By moving a reflective element
359224, 359298, 348203, 348205, 23546233, 23546236, G02B 2608, G02B 2610, G02B 7198
Patent
active
059204176
DESCRIPTION:
BRIEF SUMMARY
1. Field of the Invention
This invention relates generally to mechanical television scanning mechanisms and more particularly to microelectromechanical television scanning mechanisms fabricated according to the principles used to fabricate monolithic integrated circuits, thus enabling the physical dimensions of the scanning mechanism to be submillimeter in scale.
2. Description of the Prior Art
Typically, prior art mechanical television scanning mechanisms are large, require external light sources or sensors, have limited operating frequencies and geometrical fields of view, and are fragile. Additionally, prior art mechanical scanners generally include many components. Such mechanisms generally require extensive and intricate manufacturing processes, with associated high costs and low reliability.
Therefore, there is a need for a scanning mechanism that is small in size, facilitates integral or other non-integral radiation sources or sensors, has a wide geometrical field of view, high operating frequency and is robust in construction. Of the known mechanical television scanning mechanisms, only the scanner provided by the present invention is fabricated in much the same manner as monolithic integrated circuits, thus enabling the physical dimensions of the device to be exceedingly small.
GOTO, in U.S. Pat. No. 5,097,354, discloses a beam scanner which is an electrostatically actuated, torsionally supported two-dimensional scanning mirror. This scanner is constructed in two components. In addition to its simplicity, the scanner features a torsional mirror mount which limits the range of angular deflection of the mirror. This patent also discloses transducers including a vibrating photoelectric sensor in the focal plane of a Fresnel lens.
PETERSEN, in an article entitled "Silicon Torsional Scanning Mirror", IBM J. Res. Develop., Vol. 24, no. 5, Sep. 1980, discloses a silicon torsional scanning mirror which is electrostatically actuated and torsionally supported on a single scanning axis. The device disclosed is constructed in two components, including a scanning mirror element. The scanning mirror element is fabricated from single crystal silicon, which limits the precision of fabrication due to crystal plane etching.
LIDDIARD, in U.S. Pat. No. 4,708,420, discloses a focal plane scanning device which uses piezoelectric actuators and a mirror rigidly fixed to a central compliant flexure member. This arrangement permits deflection about two axes.
BURKE, in U.S. Pat. No. 4,230,393, discloses a two-axis optical scanner which uses a compliant flexure member. The flexure member is compliant in two axes, with each axis having an associated resonance. The flexure member is excited into oscillation at one end by a mechanical oscillator, and has a scanning mirror located at its other end. The scanning mirror scans in the two axes at the associated resonance frequencies in response to excitation by the mechanical oscillator.
LAKERVELD et al., in U.S. Pat. No. 4,073,567, disclose a pivoting mirror device which is actuated electromagnetically. The device includes an oscillating mirror that is centrally supported by a single point bearing, and the bearing permits the mirror to oscillate about two axes.
Finally, BAKER et. al., in U.S. Pat. No. 3,471,641, disclose a resonant scanning apparatus for deflecting a mirror which uses electromagnetic or piezoelectric actuators. This device includes a mirror rigidly fixed to a central compliant flexure member that is actuated by the actuators to permit deflection about two axes.
SUMMARY OF THE INVENTION
The long-standing but heretofore unfulfilled need for a scanning device having the desirable features of small physical dimensions, integral light or other radiation sources or sensors, a wide geometrical field of view, high operating frequency, robust construction, easy manufacture, low cost and high reliability, is fulfilled by the invention disclosed and described in the detailed description which follows.
According to one aspect, the invention is a scanning device. The scannin
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Burke Margaret
Epps Georgia
Medcam, Inc.
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