Spectrometer objective for particle beam measuring instruments

Details Spectrometer objective for particle beam measuring instruments Spectrometer objective for particle beam measuring instruments

1987-11-13

1989-03-14

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250305, 250397, H01J 3726

Patent

active

048126519

ABSTRACT:
A spectrometer objective includes a generally asymmetrical objective lens having a short focal length, a deflection system disposed within the objective lens symmetrically relative to an optical axis, and an electrostatic retarding field spectrometer including an electrode arrangement for accelerating the secondary electrons generated on the specimen. The electrode arrangement of the retarding field spectrometer includes an electrode pair for establishing a spherically symmetrical retarding field. The electrode arrangement for extracting and accelerating the secondary particles includes a grid electrode disposed in a region of the lower pole piece of the objective lens and of a planar electrode disposed in the particle beam path immediately above the specimen, wherein the planar electrode is charged with a potential lying between the potential of the specimen and the potential of the grid electrode.

REFERENCES:
patent: 3896308 (1975-07-01), Venables
patent: 4514682 (1985-04-01), Feuerbaum
patent: 4587425 (1986-05-01), Plows
patent: 4658137 (1987-04-01), Garth et al.
patent: 4675524 (1987-06-01), Frosien et al.
patent: 4683376 (1987-07-01), Feuerbaum
patent: 4694170 (1987-09-01), Slodzian et al.
Publication by E. Plies and J. Kolzer, entitled: "A New Objective Lens with In-Lens Spectrometer for Electron Beam Testing", pp. 625-626, 1986.

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