Shield and cover for target of sputter coating apparatus

Details Shield and cover for target of sputter coating apparatus Shield and cover for target of sputter coating apparatus

1998-01-27

1998-11-17

Davis, Antoine Duval

Machines not elsewhere specified

Material working, abrading, or founding machinery

Element or attachment

1509

Patent

active

D04012526

REFERENCES:
patent: 5690795 (1997-11-01), Rosenstein et al.

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