Process for fabricating a magnetic recording medium

Details Process for fabricating a magnetic recording medium Process for fabricating a magnetic recording medium

1996-02-21

1999-12-14

King, Roy V.

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

427577, 4272555, 4272557, 4272497, 427128, 427131, 427906, 156643, H05H 124, C23C 1650

Patent

active

060014318

ABSTRACT:
A process for depositing a diamond-like carbon film, which comprises providing a means for generating a sheet-like beam-type plasma region inside a vacuum vessel for depositing the diamond-like carbon film, and depositing the film on a substrate being moved through said plasma region. Also claimed is an apparatus for fabricating a magnetic recording medium by sequentially and continuously forming a magnetic layer and a diamond-like carbon film on a polymer substrate material, which comprises at least a first vacuum vessel for forming the magnetic layer of the magnetic recording medium and a second vacuum vessel for forming the diamond-like carbon film, provided that the pressure difference between the operation pressures for the first vessel and the second vessel is set in the range of from 10.sup.-2 to 10.sup.-5 Torr.

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