Coating apparatus – Gas or vapor deposition – With treating means
Patent
1997-06-17
1999-01-05
Breneman, Bruce
Coating apparatus
Gas or vapor deposition
With treating means
118723VE, 118724, 118725, 20429809, C23C 1600
Patent
active
058556842
ABSTRACT:
The present invention relates to a novel method for the plasma assisted high vacuum vapor coating of parts with wear resistant coatings where the method comprises at least the process steps heating and conditioning and where the process step conditioning comprises heating. A protective gas is used for the heating. It is circulated at a pressure of at least 0.01 bar. Significant advantages are realized over state of the art methods using radiation heating. The method is preferentially carried out in an apparatus conceived for it, which comprises a blower (3), protective shields (8) and gas flow management sheets(9).
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Breneman Bruce
Lund Jeffrie R.
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