MBE deposition method employing effusion cell having a unibody c

Details MBE deposition method employing effusion cell having a unibody c MBE deposition method employing effusion cell having a unibody c

1997-03-12

1999-08-03

Dye, Rena L.

Coating processes

Direct application of electrical, magnetic, wave, or...

Electrostatic charge, field, or force utilized

427576, 427578, 4272551, 118726, 392389, 219420, 432156, 432157, 432263, 432265, H05H 124, F27B 1402

Patent

active

059322942

ABSTRACT:
A unibody, monolithic, one-piece negative draft crucible for a MBE effusion cell. The crucible maximizes capacity, uniformity and long term flux stability, and minimizes oval defects, depletion effects, and short term shutter-related flux transients. The invention also provides a method and mandrel apparatus for making a unibody containment structure, such as a crucible formed of PBN, having a negative draft, via chemical vapor deposition.

REFERENCES:
patent: D282894 (1986-03-01), Watson et al.
patent: D295145 (1988-04-01), Jeanjean
patent: 4217855 (1980-08-01), Takagi
patent: 4646680 (1987-03-01), Maki
patent: 4812326 (1989-03-01), Tsukazaki et al.
patent: 4813373 (1989-03-01), Demay et al.
patent: 4833319 (1989-05-01), Knauer
patent: 4856457 (1989-08-01), Knauer
patent: 5034604 (1991-07-01), Streetman et al.
patent: 5099791 (1992-03-01), Tsukazaki et al.
patent: 5158750 (1992-10-01), Finicle
patent: 5432341 (1995-07-01), Gspann
patent: 5574958 (1996-11-01), Kawano
Copy of European Supplementary Search Report for European Application No. 96 915 496.2.
Crucible Weldment--175, 2.75", 4.5" CF Mount Drawing, EPI, 1290, Hammond Road, St. Paul, Minnesota (drawn May 18, 1992).
A copy of the International Search Report for PCT Application No. PCT/US97/15229.

Affiliated with

Also associated with

Rating

MBE deposition method employing effusion cell having a unibody c does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with MBE deposition method employing effusion cell having a unibody c, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and MBE deposition method employing effusion cell having a unibody c will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-847806