Method of ashing

Details Method of ashing Method of ashing

1993-08-26

1995-02-28

Dang, Thi

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156646, 156651, 156668, 134 1, H05H 100, H01L 2100

Patent

active

053933745

ABSTRACT:
A method of ashing comprises the steps of cooling the work to a temperature of 0.degree. C. or therebelow and causing ashing of a photo-resist on the work. An apparatus for ashing comprises a cooling ashing chamber, a heating ashing chamber, and a gate valve provided between the two chambers. The method and apparatus as noted solves prior art problems and permits photo-resist which has heretofore been difficult to remove to be removed as well and readily and with satisfactory productivity.

REFERENCES:
patent: 4816638 (1989-03-01), Ukai et al.
patent: 4938839 (1990-07-01), Fujimura et al.
patent: 4980022 (1990-12-01), Fujimura et al.
patent: 5030319 (1991-07-01), Nishino et al.
patent: 5226056 (1993-07-01), Kikuchi et al.
patent: 5240556 (1993-08-01), Ishikawa et al.

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