Trench separator for self-defining discontinuous film

Details Trench separator for self-defining discontinuous film Trench separator for self-defining discontinuous film

1997-05-29

1999-09-21

Martin-Wallace, Valencia

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257301, 257303, 257306, 257310, H01L 2994

Patent

active

059557567

ABSTRACT:
A discontinuous film structure on a substrate, with an etch stop layer on the substrate, a separator layer with an opening formed therein on the etch stop layer and a discontinuous-as-deposited film on the separator layer, the discontinuity substantially in register with the opening. The structure is made into a stacked capacitor with the discontinuous film being the bottom electrode, by forming a continuous dielectric layer on the bottom electrode and a continuous top electrode layer on the dielectric layer.

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