Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent
1996-08-06
1999-03-16
Moses, Richard
Photocopying
Projection printing and copying cameras
Illumination systems or details
355 53, 355 55, 359820, G03B 2754, G03B 2742, G03B 2752
Patent
active
058837043
ABSTRACT:
A projection optical system of a projection exposure apparatus according to the present invention has a plurality of optical members made of glass materials at least one of which has a temperature characteristic of index of refraction different from that of the other glass material. Further, a temperature control device for controlling a temperature of at least one of the optical members is provided. An imaging characteristic of the projection optical system is controlled. The imaging characteristic to be controlled is a non-linear magnification or curvature of field. The temperature control device sets the temperature to be controlled to a variable target temperature determined in accordance with the imaging characteristic of the projection optical system. An exposing operation for transferring a mask pattern to a photosensitive substrate is started after the temperature of the optical member to be controlled reaches a predetermined allowable range of the target temperature.
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Kiuchi Tohru
Murakami Seiro
Nishi Kenji
Tanaka Yasuaki
Ushida Kazuo
Moses Richard
Nikon Corporation
Virmani Shival
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