Method to monitor lens heating effects

Details Method to monitor lens heating effects Method to monitor lens heating effects

1998-03-26

1999-12-07

Gutierrez, Diego

Radiation imagery chemistry: process, composition, or product th

Including control feature responsive to a test or measurement

430369, 374 45, G03C 500

Patent

active

059980710

ABSTRACT:
A low cost, fast method for evaluating the effects of lens heating in a step and repeat projection system is disclosed. The first step is to form a series of photoresist images on a single substrate in the same way as would be done during normal stepping and repeating. The first few images, located centrally, will be produced by a cool lens. As more images are generated, the lens gradually heats up so that the final few images, which are placed alongside the `cool` images, will be produced by a hot lens. Critical dimension bars are present in all image fields (at diagonally opposite corners and in the center), their size in the developed photoresist being an indication of the extent to which the focal plane has drifted. This is then used to compute correction factors for the manufacturer's scaling constants and/or to evaluate the extent, if any, of curvature of field in the projected images.

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