Method of dry etching and apparatus for use in such method

Details Method of dry etching and apparatus for use in such method Method of dry etching and apparatus for use in such method

1988-07-01

1989-11-07

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156646, 156653, 156657, 1566591, 156662, 156345, 20419237, 204298, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

048789950

ABSTRACT:
This invention provides a method of dry etching and an apparatus for use with such method capable of producing a multi-layered structure having substantially a vertical wall and high selectivity. There is provided a method of the dry etching that disposing an object having a first film and second film thereon in a vacuum chamber, introducing an activated reactive gas, and cooling the object in the temperature or less being deposited a film including at least the first film material on the first film.

REFERENCES:
patent: 4654114 (1987-03-01), Kadomura
patent: 4717447 (1988-12-01), Dieleman et al.
patent: 4786361 (1988-11-01), Sekine et al.
patent: 4789426 (1988-12-01), Pipkin
Applied Physics Letter, vol. 49, No. 24.9.163; A. Bensaoula et al.; Dec. 1986.

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