Refrigeration – Using electrical or magnetic effect – Thermoelectric; e.g. – peltier effect
Patent
1998-05-21
1999-12-07
Doerrler, William
Refrigeration
Using electrical or magnetic effect
Thermoelectric; e.g., peltier effect
622592, F24B 2102
Patent
active
059963530
ABSTRACT:
The invention provides an apparatus for controlling a temperature of a component of a processing system comprising one or more thermoelectric devices disposed in thermal conduction with the component and a thermal fluid passage disposed in thermal conduction with the thermoelectric device. To regulate the temperature of the component, the thermoelectric device is connected to an electrical power, and a thermally conductive fluid is flowed through the thermal passage. The invention further provides an apparatus for removing particles comprising one or more thermoelectric devices disposed on a gas exhaust line. To remove particles from a processing system, the thermoelectric devices are connected to an electrical power source to create a cold trap within the gas exhaust on which particles condense.
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Aranovich Julio
Maxwell Kenneth
Applied Materials Inc.
Doerrler William
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