Metal working – Method of mechanical manufacture – Electrical device making
Patent
1996-10-04
1999-12-07
Arbes, Carl J.
Metal working
Method of mechanical manufacture
Electrical device making
269 8, 361234, H01R 4300
Patent
active
059962186
ABSTRACT:
A method of forming an electrostatic chuck 20 for holding substrates 42 in a process chamber 40 containing a magnetic flux 43 is described. The method comprises the steps of forming a base 22 for supporting a substrate 42. An insulator 26 with an electrode 24 therein, is formed on the base 22. A magnetic shunt 34 comprising a ferromagnetic material is formed either (i) on the base 22, or (ii) in the insulator 26, or (iii) directly below, and contiguous to, the base 22.
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Cameron John F.
Deshpandey Chandra
Shamouilian Shamouil
Su Yuh-Jia
Applied Materials Inc.
Arbes Carl J.
Janah Ashok
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