Semiconductor memory cell and manufacturing method thereof

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

257309, 257534, 257773, 257926, 437 49, 437 60, 437189, 437919, H01L 2968, H01L 21265

Patent

active

053269985

ABSTRACT:
A semiconductor memory cell and device having a tubular formed storage electrode of a capacitor through which a bit line passes. The source, gate and drain of a switching transistor are arranged in a direction parallel to a longitudinal axis of the tubular storage electrode. An active region also is arranged in a parallel or superposing direction relative to the bit line and in a perpendicular direction relative to the word line. A manufacturing method thereof includes forming a switching transistor, forming a part of the capacitor storage electrode connected with the drain of the switching transistor, forming an oxide film side wall, forming a bit line in parallel to a longitudinal axis of the active region, forming a capacitor storage electrode of tubular form, covering the surface of the capacitor storage electrode with a capacitor dielectric film, and forming a plate electrode of the capacitor thereon.

REFERENCES:
patent: 4641166 (1987-02-01), Takemae et al.
patent: 4649406 (1987-03-01), Takemae et al.
patent: 4754313 (1988-06-01), Takemae et al.
patent: 4764479 (1988-08-01), Kosa
patent: 4953126 (1990-08-01), Ema
patent: 4970564 (1990-11-01), Kimura et al.
patent: 4974040 (1990-11-01), Taguchi et al.
patent: 5014103 (1991-05-01), Ema
patent: 5021357 (1991-06-01), Taguchi et al.
A new stacked Capacitor Dram Cell characterized by a storage capacitor on a bit-line structure by Kimura, Kawamoto, Kure, Hasegawa, Etoh, Aoki, Takeda, Sunami and Itoh-Central Research Laboratory, Hitachi Ltd. (IEDM 1988, pp. 596-599).
3-Dimensional stacked capacitor cell for 16M Drams by EMA, Kawanago, Nishi, Yoshida, Nishibe, Yabu, Kodama Nakano and Tagushi-Fugitsu Laboratories Limited (IEDM 1988, pp. 592-595).

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Semiconductor memory cell and manufacturing method thereof does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor memory cell and manufacturing method thereof, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor memory cell and manufacturing method thereof will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-797739

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.