Lens for charged particle beam

Details Lens for charged particle beam Lens for charged particle beam

1993-02-11

1994-03-29

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250396ML, H01J 37153

Patent

active

052987574

ABSTRACT:
A lens for a charged particle beam comprises first, second, third and fourth quadrupoles, a first aperture electrode placed in front of the first quadrupole, a second aperture electrode placed between the first quadrupole and the second quadrupole, a third aperture electrode placed between the second quadrupole and the third quadrupole, a fourth aperture electrode placed between the third quadrupole and the fourth quadrupole, a fifth aperture electrode placed behind the fourth quadrupole, means for exciting the quadrupoles to cause them to converge the charged beam to a line near the third aperture electrode, and means for applying voltage to excite the first to fifth aperture electrodes and cause them to produce an octupole lens action for correcting aperture aberration.

REFERENCES:
patent: 4075488 (1978-02-01), Okayama et al.
patent: 4429229 (1984-01-01), Gluckstern
patent: 4743756 (1988-05-01), Krivanek

Affiliated with

Also associated with

Rating

Lens for charged particle beam does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Lens for charged particle beam, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lens for charged particle beam will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-794194