Scanning interference electron microscopy

Details Scanning interference electron microscopy Scanning interference electron microscopy

1991-11-19

1994-03-29

Dzierzynski, Paul M.

Radiant energy

Inspection of solids or liquids by charged particles

250307, 250311, H01J 3726

Patent

active

052987477

ABSTRACT:
A scanning interference electron microscope includes an electron source, a focusing lens, an electron beam deflection system and a biprism. The biprism separates the primary electron beam emanating from the electron source into two beams. One of the separated beams is controlled by the deflection system to scan the sample surface, thereafter interfering with the other separated beam to generated interference fringes. The phase difference due to interaction of the first electron beam with a sample surface produces changes in the interference intensity of the interference fringes, which represent a microscopic image of the sample.

REFERENCES:
patent: 4935625 (1990-06-01), Hasegawa et al.
patent: 4998788 (1991-03-01), Osakabe et al.
patent: 5004918 (1991-04-01), Tsuno et al.
"Physical Review B", vol. 25, No. 11, Jun. 1982, pp. 6799-6804.
"Journal of Applied Physics", vol. 64, No. 10, Nov. 1988, pp. 6011-6013.

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