Serpentine superlattice methods and devices

Details Serpentine superlattice methods and devices Serpentine superlattice methods and devices

1991-07-05

1994-03-29

Kunemund, Robert

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156610, 156613, 156614, 156DIG72, 437110, 437129, 257 18, C30B 2514

Patent

active

052981088

ABSTRACT:
The disclosed invention provides a serpentine-shaped semiconductor superlattice for novel electric and electro-optic devices. The invention comprises a stepped, or vicinal substrate, having a plurality of layers deposited on the steps in succession. Each layer comprises at least two alternating materials. The extent to which each layer covers the exposed surface defines that layer's coverage ratio p. By varying the coverage ratios cyclically around p=1.0, the present invention creates undulating, or serpentine, connected paths of the materials. Each cycle of connected material may form a substantially parabolic path that grows widest at the extremum (or vertex) point of the parabola, where p=1.0. Charged carriers can be confined at these wide points, in quantum wires extending through the substrate parallel to the substrate steps. The resulting quantum mechanical structures allow reliable fabrication and operation of quantum wire lasers, waveguides and other electro-optical and electronic devices.

REFERENCES:
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patent: 5013683 (1991-05-01), Petroff et al.
patent: 5034344 (1991-07-01), Jewell et al.
M. S. Miller, et al., "Serpentine Superlattice: Concept and First Results"; paper delivered at International Conference on Semiconductor Physics, Thessaloniki, Greece, and the International MBE Conference, Aug. 1990.
Revised version of paper BA, submitted to the Journal of Crystal Growth 1990.
R. S. Geels, et al, "InGaAs Vertical-Cavity Surface-Emitting Lasers"; published in Journal of Quantum Electronics, Jun. 1991.
H. Weman, et al., "Optical Properties of AlGaAs/GaAs Quantum Well Wires Grown on GaAs Vicinal Substrates", preprint submitted for publication (date unknown).
C. Pryor, "Electronic Structure and Optical Properties of Serpentine Superlattice Quantum Wire Arrays", preprint submitted for publication (date unknown).
H. Weman, et al., "Photoluminescence Study of Quantum Wire Arrays in AlGaAs/GaAs Tilted Superlattice Structures", Abstract Submitted for Mar., 1991 Meeting of the American Physical Society (1991).
C. E. Pryor, et al., "Band Structure of the Serpentine Superlattice", Abstract Submitted for Mar. 1991 Meeting of the American Physical Society (1991).
M. S. Miller, et al., "Structure and Photoluminescence of AlGaAs Serpentine-Superlattice Quantum Wire Arrays", Abstract submitted for Mar., 1991 Meeting of the American Physical Society (1991).
M. S. Miller, et al., "Serpentine Superlattice: Concept and First Results"; Abstract Submitted for YABP Award, Student (date unknown).
Chalmers et al.; 6th International Conference on Molecular Beam Epitaxy, Aug. 1990.
"Band Gap Modulation in Two Dimensions by MBE . . . ", P. M. Petroff, et al. Journal of Crystal Growth 95 (1989) pp. 260-265, North-Holland, Amsterdam.
"Novel Approaches in 2 and 3 Dimensional . . . ", by P. M. Petroff, et al., Superlattices and Microstructures, vol. 8, No. 1, 1990.
Gaines et al, "Molecular-Beam Epitaxy Growth of Tilted GaAs/AlAs Superlattices by Deposition . . . ", J. Vac. Sci. Technol. B 6(4) 1988 pp. 1378-1381.
Petroff et al, "Novel Approaches in 2 and 3 Dimensional Confinement Structures: Processing and Properties", Superlattice Microstructures, 8(1), pp. 35-39, abstract only (date unknown).

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